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US 2020/0052201 A1Published application
Controlling dopant concentration in correlated electron materials
AssigneeArm Limited
InventorsLucian Shifren, Kimberly Gay Reid, Gregory Munson Yeric
Life of this patent
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Abstract
Subject matter disclosed herein may relate to fabrication of a correlated electron material (CEM) device. In embodiments, after formation of the one or more CEM traces, a spacer may be deposited in contact with the one or more CEM traces. The spacer may operate to control an atomic concentration of dopant within the one or more CEM traces by replenishing dopant that may be lost during subsequent processing and/or by forming a seal to reduce further loss of dopant from the one or more CEM traces.
Claims17
1-21. (canceled)
A device, comprising:
- a plurality of correlated electron material (CEM) traces formed over a first level, one or more individual CEM traces of the plurality of CEM traces to comprise an electron back-donating material to include a dopant;
- and
- a spacer formed to fill at least a portion of a trench separating adjacent individual CEM traces of the plurality of CEM traces, the spacer to control an atomic concentration of the dopant within the one or more individual CEM traces of the plurality of CEM traces at least in part by enabling diffusion of the dopant from the spacer into the one or more individual CEM traces to thereby impart particular impedance switching characteristics within the one or more individual CEM traces of the plurality of CEM traces.
A device, comprising:
- a plurality of traces to comprise a correlated electron material (CEM) to have an atomic concentration of a dopant;
- and
- a spacer to fill at least a portion of a trench separating adjacent CEM traces of the plurality of CEM traces, the spacer to restrict diffusion of a dopant species from at least one CEM trace of the adjacent CEM traces and to provide the dopant species to the at least one CEM trace to maintain an atomic concentration of the dopant within the at least one CEM trace.
Dependencies are inferred from the claim text.