Processing apparatus and processing method
AssigneeFlosfia Inc.
InventorsShingo YAGYU, Toshimi HITORA
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Abstract
A processing system and a processing method are provided that allows for convenient and easy, roll-to-roll processing of both sides of a substrate at atmospheric pressure. A system of processing a substrate using mist or droplets containing a processing agent, wherein the mist or droplets is allowed to be retained and the substrate is processed by impregnating with the retained mist or droplets using a processing device including a retaining section that retains the mist or droplets and an impregnation section that impregnates the substrate with the mist or droplets.
Claims22
A processing system comprising:
- an impregnation device that is configured to impregnate a base with mist containing a processing agent under an atmosphere of the mist.
A processing method, comprising:
- impregnating a base with mist containing a processing agent under an atmosphere of the mist.
Dependencies are inferred from the claim text.