Method of making radiation detector
AssigneeShenzhen Xpectvision Technology Co., Ltd.
InventorsPeiyan CAO, Yurun LIU
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Abstract
Disclosed herein is a method for making a radiation detector. The method comprises forming a recess into a substrate and forming a semiconductor single crystal in the recess. The semiconductor single crystal may be a cadmium zinc telluride (CdZnTe) single crystal or a cadmium telluride (CdTe) single crystal. The method further comprises forming electrical contacts on the semi conductor single crystal and bonding the substrate to another substrate comprising an electronic system therein or thereon. The electronic system is connected to the electrical contact of the semiconductor single crystal and configured to process an electrical signal generated by the semiconductor single crystal upon absorption of radiation particles.
Claims23
A method comprising:
- forming a recess into a substrate;
- forming a semiconductor single crystal in the recess.
23-37. (canceled)
Dependencies are inferred from the claim text.