Controlling Detection Time in Photodetectors
AssigneeWaymo LLC
InventorsCaner Onal, Simon Verghese, Pierre-Yves Droz
Life of this patent
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Abstract
Example embodiments relate to controlling detection time in photodetectors. An example embodiment includes a device. The device includes a substrate. The device also includes a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device. A depth of the substrate is at most 100 times a diffusion length of a minority carrier within the substrate so as to mitigate dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.
Claims15
A method comprising:
- providing a device comprising:
- a substrate;
- and
- a photodetector coupled to the substrate,
- wherein the photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device;
- providing light from the light source;
- and
- mitigating dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.
A method of manufacture comprising:
- providing a substrate;
- forming a photodetector within or on the substrate, wherein the photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the photodetector;
- and
- performing a processing step that mitigates dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.
Dependencies are inferred from the claim text.