Multi-sensor optical device for detecting chemical species and manufacturing method thereof
AssigneeSTMicroelectronics S.r.l.
InventorsMassimo Cataldo MAZZILLO, Alfio RUSSO
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Abstract
An optical device for detecting a first chemical species and a second chemical species contained in a specimen, which includes: a first optical sensor, which may be optically coupled to an optical source through the specimen and is sensitive to radiation having a wavelength comprised in a first range of wavelengths; and a second optical sensor, which may be optically coupled to the optical source through the specimen and is sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.
Claims20
A device, comprising:
- a substrate with a first surface and a second surface facing away from the first surface;
- an epitaxial layer on the first surface of the substrate, the epitaxial layer having plurality of edges, a third surface with a first perimeter, and a fourth surface with a second perimeter, the third surface is closer to the first surface of the substrate than the fourth surface;
- a first anode region on the third surface of the epitaxial layer and positioned within the first perimeter, the first anode region spaced from the plurality of edges of the epitaxial layer;
- a second anode region on the fourth surface of the epitaxial layer and positioned within second perimeter, the second anode region spaced from the plurality of edges of the epitaxial layer;
- a first anode metallization on the first anode region;
- and
- a second anode metallization on the second anode region.
A device, comprising:
- a substrate with a first surface and a second surface facing away from the first surface;
- an epitaxial layer on the first surface of the substrate, the epitaxial layer having a third surface, a fourth surface, and fifth surface, the third surface and the fourth surface face away from the first surface of the substrate, the fifth surface of the epitaxial layer extends from the third surface to the fourth surface and extends from the third surface to the fourth surface;
- a first optoelectronic sensor on the third surface of the epitaxial layer;
- and
- a second optoelectronic sensor on the fourth surface of the epitaxial layer.
A method, comprising:
- forming an epitaxial layer with a first portion with a first thickness and a second portion with a second thickness greater than the first thickness on a first surface of a substrate;
- forming a contact layer on a second surface of the substrate facing away from the first surface of the substrate;
- forming a first anode region on the first portion of the epitaxial layer and a second anode region on the second portion of the epitaxial layer;
- forming a first anode metallization on the first anode region and a second anode metallization on the second anode region;
- and
- forming a cathode layer on the contact layer.
Dependencies are inferred from the claim text.