Semiconductor wafer and method of probe testing
AssigneeSemiconductor Components Industries, LLC
InventorMichael J. SEDDON
Life of this patent
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Abstract
Implementations of methods of making a semiconductor device may include: providing a partial semiconductor wafer. The method may also include providing a wafer holder including a tape portion with one or more openings through the tape portion. The method may include mounting the partial semiconductor wafer over the one or more openings in the tape portion of the wafer holder and providing an electrical connection to the partial semiconductor wafer through the one or more openings in the tape portion during probe test.
Claims20
A method of making a semiconductor device, comprising:
- providing a partial semiconductor wafer;
- providing a wafer holder including a tape portion with one or more openings through the tape portion;
- mounting the partial semiconductor wafer over the one or more openings in the tape portion of the wafer holder;
- and
- providing an electrical connection to the partial semiconductor wafer through the one or more openings in the tape portion during probe testing.
An apparatus for probe testing a semiconductor device, comprising:
- a semiconductor wafer;
- and
- a wafer holder including a film portion with one or more openings through the film portion, wherein the semiconductor wafer is mounted over the opening in the film portion of the wafer holder and the opening in the film portion is configured to establish an electrical connection to the semiconductor wafer through the opening in the film portion during probe test.
An apparatus for probe testing a semiconductor device, comprising:
- a semiconductor wafer;
- a wafer holder including a support structure;
- and
- a conductive trace formed on the support structure, wherein the semiconductor wafer is mounted over the support structure of the wafer holder and the conductive trace is configured to establish an electrical connection to the semiconductor wafer through the conductive trace during probe testing.
Dependencies are inferred from the claim text.