Dual-zone heater for plasma processing
AssigneeApplied Materials, Inc.
InventorsXing LIN, Jianhua ZHOU, Juan Carlos ROCHA-ALVAREZ, Ramprakash SANKARAKRISHNAN
Life of this patent
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Abstract
A method and apparatus for a pedestal is provided. In one embodiment, the pedestal includes a body comprising a ceramic material having a flange, one or more heating elements embedded in the body, a first shaft coupled to the flange, and a second shaft coupled to the first shaft; wherein the second shaft includes a plurality of fluid channels formed therein that terminate in the second shaft.
Claims20
A pedestal for a semiconductor processing chamber, comprising:
- a body comprising a ceramic material;
- a plurality of heating elements encapsulated within the body;
- a first shaft coupled to the body;
- and
- a second shaft coupled to the first shaft;
- wherein the second shaft includes a plurality of fluid channels formed therein, at least a portion of the fluid channels terminating in the second shaft, wherein the first shaft is made of a first material and the second shaft is made of a second material that is different than the first material.
A pedestal for a semiconductor processing chamber, comprising:
- a body comprising a ceramic material;
- a plurality of heating elements encapsulated within the body;
- a first shaft coupled to the body;
- and
- a second shaft coupled to the first shaft;
- wherein the second shaft includes a plurality of fluid channels formed therein, at least a portion of the fluid channels terminating in the second shaft and at least a portion of the fluid channels terminating in the body, and wherein the first shaft is made of a first material and the second shaft is made of a second material that is different than the first material.
A pedestal for a semiconductor processing chamber, comprising:
- a body comprising a ceramic material;
- a plurality of heating elements encapsulated within the body;
- a first shaft coupled to the body;
- and
- a second shaft surrounded by a sleeve and coupled to the first shaft;
- wherein the second shaft includes a plurality of fluid channels formed therein, at least a portion of the fluid channels terminating in the second shaft, wherein the first shaft is made of a first material and the second shaft is made of a second material that is different than the first material.
Dependencies are inferred from the claim text.