Semiconductor stocker systems and methods
AssigneeBrooks Automation (Germany) GmbH
InventorLutz REBSTOCK
Life of this patent
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Abstract
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
Claims14
A method for decontaminating a workpiece, wherein the workpiece comprises a first container for storing an article, wherein the first container is stored within a second container, the method comprising
- transferring the workpiece to a first station, wherein the first station is configured to decontaminate the workpiece;
- establishing a vacuum ambient within the first station;
- pumping volume between the first container and the second container;
- monitoring an outgassing of the workpiece, wherein the outgassing is caused by the vacuum ambient and by the pumping;
- flowing an inactive gas to the first station;
- flowing an active gas to the volume between the first container and the second container;
- transferring the workpiece out of the first station.
A method for storing a multi-compartment workpiece, wherein the multi-compartment workpiece comprise at least one compartment enclosing at least another compartment, the method comprising:
- transferring the multi-compartment workpiece to a storage compartment of a storage chamber having one or more nozzles;
- distributing a compartment inerting system to the one or more nozzles in the storage compartment;
- coupling the compartment inerting system to an interior of the at least one compartment that encloses the at least another compartment of the multi-compartment workpiece stored in the storage compartment;
- and
- inerting an enclosing volume defined between the at least one compartment of the multi-compartment workpiece and the at least another compartment of the multi-compartment workpiece.
Dependencies are inferred from the claim text.