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US 2020/0051835 A1Published application
Annealing apparatus
AssigneeSamsung Display Co., Ltd.
InventorsByung Soo SO, In Cheol KO, Jong Jun BAEK, Jae Woo JEONG
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Abstract
An annealing apparatus includes: a main body configured to receive a substrate; a microwave generating unit configured to generate microwaves to be transmitted to the main body; an incidence unit configured to transmit the microwaves from the microwave generating unit to the main body; and a diffraction unit disposed between the incident unit and the main body. The diffraction unit is configured to pass the microwaves therethrough before they are transmitted to the main body.
Claims20
An annealing apparatus comprising:
- a main body configured to receive a substrate;
- a microwave generating unit configured to generate microwaves to be transmitted to the main body;
- an incidence unit configured to transmit the microwaves from the microwave generating unit to the main body;
- and
- a diffraction unit disposed between the incident unit and the main body, the diffraction unit configured to pass the microwaves therethrough before they are transmitted to the main body.
2 more elements
Dependencies are inferred from the claim text.