Selective modification method of a base material surface
AssigneeJsr Corporation
InventorsHitoshi OSAKI, Hiroyuki KOMATSU
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AssigneeJsr Corporation
InventorsHitoshi OSAKI, Hiroyuki KOMATSU
Estimating the term…
A selective modification method of a base material surface includes subjecting at least a part of a surface of a base material to at least one surface treatment selected from the group consisting of an oxidization treatment and a hydrophilization treatment. The base material includes a surface layer and includes an oxide, a nitride or an oxynitride of silicon, or a combination thereof in a first region of the surface layer. A nonphotosensitive composition is applied directly or indirectly on the surface of the base material after the surface treatment. The nonphotosensitive composition includes: a first polymer containing a nitrogen atom; and a solvent. It is preferred that the base material contains a metal in a second region which is other than the first region of the surface layer. In the surface treatment step, an O2 plasma treatment is preferably conducted.
A selective modification method of a base material surface comprising:
Dependencies are inferred from the claim text.