Field-effect transistors with a grown silicon-germanium channel
AssigneeGlobalfoundries Inc.
InventorsCarsten Metze, Berthold Reimer, Simeon Morvan
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AssigneeGlobalfoundries Inc.
InventorsCarsten Metze, Berthold Reimer, Simeon Morvan
Estimating the term…
Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. A first channel region containing a first semiconductor material and a second channel region containing a second semiconductor material are formed over a buried insulating layer of a silicon-on-insulator substrate. A first gate electrode of a first field-effect transistor is formed over the first channel region. A second gate electrode of a second field-effect transistor is formed over the second channel region. The first semiconductor material of the first channel region has a first germanium concentration. The second semiconductor material of the second channel region has a second germanium concentration that is greater than the first germanium concentration in the first semiconductor material of the first channel region.
A method of comprising:
A structure comprising:
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Dependencies are inferred from the claim text.