Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus

A computer readable recording medium storing a program causing a computer to execute a process for generating writing data used by a multi-charged particle beam writing apparatus, the process comprising:

• referring to library data, by the program, in which a vertex sequence including a plurality of vertices is registered, and extracting a portion of an outer line of a figure contained in design data, the portion corresponding to the vertex sequence;
• and
• representing the extracted portion by information which identifies the vertex sequence and information which indicates a connection method for the plurality of vertices of the vertex sequence, and generating the writing data.

A multi-charged particle beam writing apparatus comprising:

• a writing unit that forms a multi-beam including of a plurality of charged particle beams, individually sets corresponding beams of the multi-beam to ON/OFF, and writes a pattern by irradiating a substrate with the charged particle beams;
• and
• a control unit that receives an input of writing data in which an outer line of a figure contained in design data is represented by information which designates one of a plurality of vertex sequences registered in library data, each of which includes a plurality of vertices, and by information which indicates a connection method for the plurality of vertices of the designated vertex sequence, retrieves the vertex sequence designated in the writing data from the library data, reconstructs the figure by connecting the vertices of the retrieved vertex sequence based on the information which indicates the connection method, and controls the writing unit based on the reconstructed figure.