Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method
AssigneeNikon Corporation
InventorHiroyuki NAGASAKA
Life of this patent
Estimating the term…
Abstract
A charged particle beam optical apparatus has a plurality of irradiation optical systems each of which irradiates an object with a charged particle beam and a first control apparatus configured to control a second irradiation optical system on the basis of an operation state of a first irradiation optical system.
Claims32
A charged particle beam optical apparatus that is configured to irradiate an object with a charged particle beam,
- the charged particle beam optical apparatus comprising:
- a plurality of irradiation optical systems each of which is configured to irradiate the object with the charged particle beam;
- and
- a first control apparatus that is configured to control, on the basis of an operation state of at least one first irradiation optical system of the plurality of irradiation optical systems, a second irradiation optical system of the plurality of irradiation optical systems that is different from the first irradiation optical system.
An exposure method of exposing an object by irradiating a charged particle beam,
- the exposure method including:
- irradiating the object with the charged particle beam through each of a plurality of irradiation optical systems;
- and
- controlling, on the basis of an operation state of at least one first irradiation optical system of the plurality of irradiation optical systems, a second irradiation optical system of the plurality of irradiation optical systems that is different from the first irradiation optical system.
A control apparatus for controlling a charged particle beam optical apparatus that is configured to irradiate an object with a charged particle beam from each of a plurality of irradiation optical systems,
- the control apparatus being configured to control, on the basis of an operation state of at least one first irradiation optical system of the plurality of irradiation optical systems, a second irradiation optical system of the plurality of irradiation optical systems that is different from the first irradiation optical system.
A control method of controlling a charged particle beam optical apparatus that is configured to irradiate an object with a charged particle beam from each of a plurality of irradiation optical systems,
- the control method including controlling, on the basis of an operation state of at least one first irradiation optical system of the plurality of irradiation optical systems, a second irradiation optical system of the plurality of irradiation optical systems that is different from the first irradiation optical system.
Dependencies are inferred from the claim text.