Method for evaluating a region of an object
AssigneeApplied Materials Israel Ltd.
InventorsOfer Shneyour, Ron Naftali, Ronnie Porat
Life of this patent
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Abstract
A method for evaluating a region of an object, the method may include repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of: (a) acquiring, by a charged particle imager, a charged particle image of the sub-region; and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region; acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region; and generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
Claims16
A method for evaluating a region of an object, the method comprising:
- repeating, for each sub-region out of a first sub-region of the region until a penultimate sub-region of the region, the steps of:
- (a) acquiring, by a charged particle imager, a charged particle image of the sub-region;
- and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region;
- acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region;
- and
- generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
The method according to claim 7 comprising:
- repeating, for each sub-region out of a first sub-region of an additional region until a penultimate sub-region of the additional region, the steps of:
- (a) acquiring, by a charged particle imager, a charged particle image of the sub-region;
- and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region;
- acquiring, by the charged particle imager, a charged particle image of a last sub-region of the additional region;
- and
- generating three-dimensional information about a content of the additional region based on charge particle images of the first sub-region till last sub-region of the additional region.
A computer program product that stores instructions that stores instructions for evaluating a region of an object by:
- repeating, for each sub-region out of a first sub-region of the region till a penultimate sub-region of the region, the steps of:
- (a) acquiring, by a charged particle imager, a charged particle image of the sub-region;
- and (b) milling, by a charged particle miller, the sub-region to expose another sub-region of region;
- acquiring, by the charged particle imager, a charged particle image of a last sub-region of the region;
- and
- generating three-dimensional information about a content of the region based on charge particle images of the first sub-region till last sub-region of the region.
Dependencies are inferred from the claim text.