US 2020/0050733 A1 · SEMICONDUCTOR APPARATUS INCLUDING UNCROWNED AND CROWNED CELLS AND METHOD OF MAKING

Abstract

A semiconductor apparatus includes a first cell having a first interconnect structure and a second cell having a second interconnect structure. The semiconductor apparatus further includes a first plurality of conductive segments, wherein each conductive segment of the first plurality of conductive segments directly connects a first metal level of the first interconnect structure to a first metal level of the second interconnect structure. The semiconductor apparatus further includes a third cell having a third interconnect structure and a fourth cell having a fourth interconnect structure. The semiconductor apparatus further includes a second plurality of conductive segments, wherein each conductive segment of the second plurality of conductive segments directly connects a second metal level of the third interconnect structure to a second metal level of the fourth interconnect structure, and the second metal level is different from the first metal level.

Claims20

Dependent claims

A semiconductor apparatus comprising:

a first cell having a first interconnect structure;
a second cell having a second interconnect structure;
a first plurality of conductive segments, wherein each conductive segment of the first plurality of conductive segments directly connects a first metal level of the first interconnect structure to a first metal level of the second interconnect structure;
a third cell having a third interconnect structure;
a fourth cell having a fourth interconnect structure;
and
a second plurality of conductive segments, wherein each conductive segment of the second plurality of conductive segments directly connects a second metal level of the third interconnect structure to a second metal level of the fourth interconnect structure, and the second metal level is different from the first metal level.

4 more elements

A method of making a semiconductor apparatus, the method comprising:

manufacturing a plurality of semiconductor devices on a substrate;
electrically connecting a first semiconductor device of the plurality of semiconductor devices to a second semiconductor device of the plurality of semiconductor devices using a first plurality of conductive segments, wherein the first plurality of conductive segments is a first distance from the substrate;
testing the electrical connection between the first semiconductor device and the second semiconductor device to obtain test data;
comparing the test data to a threshold criteria;
and
electrically disconnecting the first semiconductor device from the second semiconductor device in response to the test data failing to satisfy the threshold criteria.

3 more elements

A method of making a semiconductor apparatus, the method comprising:

manufacturing a plurality of semiconductor devices on a substrate;
electrically connecting a first semiconductor device of the plurality of semiconductor devices to a second semiconductor device of the plurality of semiconductor devices using a first plurality of conductive segments, wherein the first plurality of conductive segments is a first distance from the substrate;
testing the electrical connection between the first semiconductor device and the second semiconductor device to obtain test data;
comparing the test data to a threshold criteria;
and
in response to the test data failing to satisfy the threshold criteria:
forming a first interconnect structure over the first semiconductor device,
forming a second interconnect structure over the second semiconductor device, and
electrically connecting the first interconnect structure to the second interconnect structure.

6 more elements

Dependencies are inferred from the claim text.

Semiconductor apparatus including uncrowned and crowned cells and method of making

Life of this patent

Semiconductor apparatus including uncrowned and crowned cells and method of making

Life of this patent

Abstract

Claims20