Photosensitive composition for euv light, pattern forming method, and method for manufacturing electronic device

A photosensitive composition for EUV light, comprising:

• a resin that has an increased polarity by the action of an acid polarity and thus, has an increased solubility in an alkali developer and a decreased solubility in an organic solvent;
• and
• a photoacid generator, or
• comprising:
• a resin that has a repeating unit having a photoacid generating group, has an increased polarity by the action of an acid polarity and thus, has an increased solubility in an alkali developer and a decreased solubility in an organic solvent, and
• satisfying Conditions 1 and 2:
• Condition 1:
• an A value determined by Formula (1) is 0.14 or more,
• A=([H]×0.04+[C]×1.0+[N]×2.1+[O]×30.6+[F]×50.6+[S]×1.5+[I]×39.5)/([H]×1+[C]×12+[N]×14+[O]×16+[F]×19+[S]×32+[I]×127) Formula (1):
• in the formula, [H] represents a molar ratio of hydrogen atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [C] represents a molar ratio of carbon atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [N] represents a molar ratio of nitrogen atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [O] represents a molar ratio of oxygen atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [F] represents a molar ratio of fluorine atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [S] represents a molar ratio of sulfur atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, and [I] represents a molar ratio of iodine atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light;
• and
• Condition 2:
• a concentration of the solid content in the photosensitive composition for EUV light is 2.5% by mass or less.