US 2020/0050099 A1 · ASSIST FEATURE PLACEMENT BASED ON MACHINE LEARNING

Abstract

A method including: obtaining a portion of a design layout; determining characteristics of assist features based on the portion or characteristics of the portion; and training a machine learning model using training data including a sample whose feature vector includes the characteristics of the portion and whose label includes the characteristics of the assist features. The machine learning model may be used to determine characteristics of assist features of any portion of a design layout, even if that portion is not part of the training data.

Claims20

Dependent claims

A method comprising:

obtaining a portion of a design layout or a characteristic of the portion;
and
obtaining, by a hardware computer system, a characteristic of an assist feature for the portion, using a machine learning model, based on the portion or the characteristic of the portion.

Dependencies are inferred from the claim text.

Facts

Application

16/606,791Filed 4 May 2018

Priority

26 May 2017

Published

13 Feb 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

G03F 1/36
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles…
G05B 19/4097
Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to…
G06F 30/392
Circuit design at the physical level: floor-planning or layout, e.g. partitioning or placement
G06N 20/10
Machine learning: using kernel methods, e.g. support vector machines [SVM]

Assist feature placement based on machine learning

Life of this patent

Assist feature placement based on machine learning

Life of this patent

Abstract

Claims20