Optical module
AssigneeHamamatsu Photonics K.K.
InventorsTomofumi SUZUKI, Tatsuya SUGIMOTO, Kyosuke KOTANI
Life of this patent
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Abstract
An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.
Claims6
An optical module comprising:
- a support layer;
- a device layer which is provided on the support layer;
- and
- a movable mirror which is mounted in the device layer,
- wherein the device layer has
- a mounting region in which the movable mirror is mounted, and
- a driving region which is connected to the mounting region,
- wherein a space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer, and
- wherein the mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.
Dependencies are inferred from the claim text.