Probe apparatus, probe inspection method, and storage medium
AssigneeTokyo Electron Limited
InventorsTomohiro Ota, Mitsuyoshi Miyazono, Shinya Koizumi, Atsushi Ishii, Takashi Tasaki
Life of this patent
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Abstract
In a probe apparatus for performing an electrical measurement by bringing a probe into contact with an inspection target substrate, a transfer table is provided with a needle mark transfer member to which a needle mark of the probe is transferred by a contact with the probe. The needle mark transfer member includes a polyimide resin. A movement mechanism is able to move the needle mark transfer member provided on the transfer table to a contact position where the needle mark transfer member is brought into contact with the probe.
Claims18
A probe apparatus for performing an electrical measurement by bringing a probe provided on a probe card into contact with a substrate placed on a placement table, the probe apparatus comprising:
- a transfer table provided with a needle mark transfer member to which a needle mark of the probe is transferred and configured to bring the probe into contact with the needle mark transfer member, instead of bringing the probe into contact with the substrate;
- and
- a mover configured to move an arrangement position of at least one of the transfer table and the probe card between a contact position where the needle mark transfer member is brought into contact with the probe and a separation position where the needle mark transfer member is separated from the contact position,
- wherein the needle mark transfer member includes a polyimide resin.
A method of inspecting a probe of a probe apparatus that performs an electrical measurement by bringing a probe provided on a probe card into contact with a substrate, the method comprising:
- transferring a needle mark of the probe by bringing the probe into contact with a needle mark transfer member that includes a polyimide resin.
A non-transitory computer-readable storage medium storing a computer program used in a probe apparatus for performing an electrical measurement by bringing a probe provided on a probe card into contact with a substrate placed on a placement table and causes a computer to perform a process of inspecting the probe, the process comprising:
- transferring a needle mark of the probe by bringing the probe into contact with a needle mark transfer member that includes a polyimide resin.
Dependencies are inferred from the claim text.