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US 2020/0049655 A1Published application
Chemical sensor with air via
AssigneeLife Technologies Corporation
InventorsJames LI, Jordan OWENS, James BUSTILLO
Life of this patent
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Abstract
In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.
Claims6
A chemical sensor comprising:
- a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface;
- a first opening extending through a first material and through a portion of a second material;
- and
- a second opening extending from the bottom of the first opening to the top of a liner layer on a metal layer located on the upper surface of the floating gate conductor.
1 more element
Dependencies are inferred from the claim text.