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US 2020/0049651 A1Published application
Moisture detection and ingression monitoring systems and methods of manufacture
AssigneeInternational Business Machines Corporation
InventorsFen CHEN, Jeffrey P. GAMBINO, Carole D. GRAAS, Wen LIU, Prakash PERIASAMY
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Abstract
Moisture detection and ingression monitoring systems and methods of manufacture are provided. The moisture detection structure includes chip edge sealing structures including at least one electrode forming a capacitor structured to detect moisture ingress within an integrated circuit. The at least one electrode and a second electrode of the capacitor is biased to ground and to a moisture detection circuit or vice versa, respectively.
Claims18
A moisture detection structure comprising:
- a crackstop structure extending through multiple wiring layers and insulator layers along an edge of the chip, the crackstop structure including an electrode extending towards the edge of the chip;
- a guardring structure extending through the multiple wiring layers and the insulator layers along an edge of the chip and at a different location from the guardring structure;
- and
- a moisture detection circuit composed of the electrode of the crackstop structure and another electrode on different wiring level.
1 more element
A moisture detection structure comprising:
- a substrate:
- a guardring structure extending from the substrate at an edge of a chip, the guardring structure including a first electrode extending therefrom;
- a crackstop structure extending from the substrate and further away from the edge of the chip than the guardring structure;
- and
- a capacitor plate having a second electrode plate at a different wiring level than the electrode extending from the guardring structure.
2 more elements
Dependencies are inferred from the claim text.