Optical particle detector

A particle detector, comprising:

• one channel configured to receive at least one fluid comprising particles;
• one optical inlet configured to receive at least one incident luminous radiation;
• a first plurality of reflecting surfaces arranged between the optical inlet and the channel;
• a matrix of photo detectors arranged facing the channel;
• and
• a second plurality of reflecting surfaces arranged between the channel and the matrix of photo detectors such that the channel is disposed between the first and the second pluralities of reflecting surfaces,
• wherein the first and the second pluralities of reflecting surfaces, the matrix of photo detectors, and the channel being arranged such that a portion at least of the incident luminous radiation passing through the channel is scattered by at least one particle present in the channel thus forming scattered light rays, the reflecting surfaces of the second plurality extending principally in a plane and being spaced from one another in the plane in order to arrange spaces between them, such that a portion at least of the scattered light rays can pass from the channel to the matrix of photo detectors by passing through the spaces between the reflecting surfaces of the second pluralities of reflecting surfaces and without passing through a reflecting surface of the second plurality.

A method of manufacturing a detector of particles, the method comprising:

• supplying at least one first substrate comprising at least one first plurality of reflecting surfaces extending in a first plane parallel to a principal plane and comprising at least one optical inlet configured to receive at least one incident luminous radiation in a direction inclined with respect to the principal plane;
• supplying at least one second substrate comprising at least one second plurality of reflecting surfaces, the second substrate extending in a second plane parallel to the principal plane;
• supplying at least one third substrate comprising at least one matrix of photo detectors extending in a third plane parallel to the principal plane;
• and
• forming a stack extending in the principal plane by assembling the first substrate, the second substrate, and the third substrate such that:
• the first and the second substrates delimit at least in part a channel for the circulation of particles,
• the first and the second pluralities of reflecting surfaces are disposed between the matrix of photo detectors and the optical inlet, and
• the first and the second pluralities of reflecting surfaces, the matrix of photo detectors, and the channel are arranged such that, if particles are present in the channel, a portion at least of the incident luminous radiation passing through the channel is scattered by at least one particle present in the channel thus forming scattered light rays, the reflecting surfaces of the second plurality extending principally in another plane and being spaced from one another in the another plane so as to arrange spaces between them, such that the scattered light rays can pass from the channel to the matrix of photo detectors by passing between the reflecting surfaces of the second pluralities of reflecting surfaces and without passing through a reflecting surface of the second plurality.