US 2020/0049570 A1 · HEAT AMOUNT MEASURING METHOD AND HEAT AMOUNT MEASURING APPARATUS

Abstract

A heat amount measuring method includes a first step of providing a heat-transferring component that transfers and receives heat to and from a heating component and measuring, while the heating component is generating heat, a first heat amount of heat transmitted from the heating component to the heat-transferring component, a first heating component temperature, and a first substrate temperature, a second step of changing an output of the heat-transferring component and measuring a second heat amount of heat transmitted from the heating component to the heat-transferring component, a second heating component temperature, and a second substrate temperature, and a third step of calculating a heat amount of heat transmitted from the heating component to a substrate by using the first heat amount, the first heating component temperature, the first substrate temperature, the second heat amount, the second heating component temperature, and the second substrate temperature.

Claims18

Dependent claims

A heat amount measuring method of measuring a heat amount of a heating component mounted on a substrate, the method comprising;

a first step of providing a heat-transferring component that transfers and receives heat to and from the heating component and measuring, while the heating component is generating heat, a first heat amount of heat transmitted from the heating component to the heat-transferring component, a first heating component temperature of the heating component, and a first substrate temperature of the substrate;
a second step of changing an output of the heat-transferring component and measuring, while the heating component is generating heat, a second heat amount of heat transmitted from the heating component to the heat-transferring component, a second heating component temperature of the heating component, and a second substrate temperature of the substrate;
and
a third step of calculating a heat amount of heat transmitted from the heating component to the substrate by using the first heat amount, the first heating component temperature, the first substrate temperature, the second heat amount, the second heating component temperature, and the second substrate temperature.

1 more element

A heat amount measuring apparatus for measuring a heat amount of a heating component mounted on a substrate, the apparatus comprising:

a controller;
a computing unit;
and
a heat-transferring component that transfers and receives heat to and from the heating component,
wherein
the controller
measures a first heat amount of heat transmitted from the heating component to the heat-transferring component, a first heating component temperature of the heating component, and a first substrate temperature of the substrate, while the heating component is generating heat, and
measures a second heat amount of heat transmitted from the heating component to the heat-transferring component, a second heating component temperature of the heating component, and a second substrate temperature of the substrate, while the heating component is generating heat after the controller changes an output of the heat-transferring component, and
the computing unit calculates a heat amount of heat transmitted from the heating component to the substrate by using the first heat amount, the first heating component temperature, the first substrate temperature, the second heat amount, the second heating component temperature, and the second substrate temperature.

6 more elements

Dependencies are inferred from the claim text.

Heat amount measuring method and heat amount measuring apparatus

Life of this patent

Heat amount measuring method and heat amount measuring apparatus

Life of this patent

Abstract

Claims18