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US 2020/0049560 A1Published application
Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device
AssigneeSamsung Electronics Co., Ltd.
InventorsJeongil MUN, Hyung Joo LEE, Jongwoo SUN
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Abstract
An optical emission spectroscopy system may include a reference light source, an analyzer to receive and analyze light transmitted from the reference light source, and a calibrator to calibrate light emitted from the reference light source. The calibrator may change a calibration ratio in accordance with an incidence angle of the light.
Claims20
An optical emission spectroscopy system, comprising:
- a reference light source;
- an analyzer to receive and analyze light transmitted from the reference light source;
- and
- a calibrator to calibrate light emitted from the reference light source,
- wherein the calibrator changes a light receiving ratio in accordance with an incidence angle of the light.
2 more elements
A method as claimed in calibrating an optical emission spectroscopy system, the method comprising:
- emitting light from a reference light source;
- calibrating light emitted from the reference light source;
- analyzing the calibrated light,
- wherein calibrating light emitted from the reference light source includes obtaining calibration factors in accordance with incidence angles of light.
1 more element
A method of fabricating a device, the method comprising:
- calibrating an optical emission spectroscopy system;
- performing an inspection process on a process chamber, using the optical emission spectroscopy system;
- loading a substrate in the process chamber;
- and
- performing a plasma process on the substrate,
- wherein calibrating the optical emission spectroscopy system includes controlling an intensity of light in accordance with an incidence angle of the light.
3 more elements
Dependencies are inferred from the claim text.