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US 2020/0049557 A1Published application
Inspection apparatus and inspection method
AssigneeIndustrial Cooperation Foundation Chonbuk National University
InventorDaesuk KIM
Life of this patent
Estimating the term…
Abstract
The present inventive concepts relate to an inspection apparatus that snapshots an interference image pattern having a high spatial carrier frequency produced from a one-piece off-axis polarimetric interferometer and that precisely and promptly measures a Stokes vector including spatial polarimetric information. The inspection apparatus dynamically measure in real-time a two-dimensional polarization information without employing a two-dimensional scanner.
Claims20
An inspection apparatus, comprising:
- a light generator that generates a light;
- a first linear polarizer that linearly polarizes the light;
- a polarization interferometer that splits the linearly polarized light into a first light and a second light and that allows the first light and the second light to have spatial phase difference information;
- a second linear polarizer that receives the first light and the second light passing through or reflecting on a measured object and that linearly polarizes the first light and the second light to produce an interference image pattern with a spatial carrier frequency including anisotropic information of the measured object;
- and
- an image sensing module that captures the interference image pattern from the second linear polarizer.
3 more elements
An inspection apparatus, comprising:
- a light generator that generates a light;
- a first linear polarizer that linearly polarizes the light;
- a beam splitter that splits the linearly polarized light into a first light and a second light and that has a first surface and a second surface on which the first light and the second light are respectively incident, the first and second surfaces being adjacent to each other;
- a first mirror and a second mirror respectively on the first surface and the second surface;
- a second linear polarizer that receives and linearly polarizes the first light and the second light from the beam splitter;
- and
- an image sensing module that captures an interference image from the second linear polarizer,
- wherein the first mirror and the second mirror have an angle deviated from perpendicular.
5 more elements
An inspection method, comprising:
- linearly polarizing a light;
- splitting the linearly polarized light into a first light and a second light;
- allowing the first light and the second light to have a spatial phase difference;
- radiating a measured object with the first light and the second light that have the spatial phase difference;
- receiving and linearly polarizing the first light and the second light from the measured object;
- and
- capturing an interference image pattern of the measured object from the linearly polarized first and second lights.
4 more elements
Dependencies are inferred from the claim text.