Sensor target cover used in combination with liquid level detection sensor, wet processing device, substrate processing device, and sensor assembly
AssigneeEbara Corporation
InventorsNaoki TOYOMURA, Mitsuru MIYAZAKI
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Abstract
A sensor target cover capable of preventing an optical liquid level detection sensor from erroneously detecting a rise in a liquid level is provided. A sensor target cover is used in combination with an optical liquid level detection sensor. The sensor target cover includes a reflecting plate, an inner wall structure surrounding the reflecting plate, and an outer wall structure surrounding the inner wall structure. A gap is formed between the inner wall structure and the outer wall structure.
Claims12
A sensor target cover used in combination with an optical liquid level detection sensor, the sensor target cover comprising:
- a reflecting plate;
- an inner wall structure surrounding the reflecting plate;
- and
- an outer wall structure surrounding the inner wall structure,
- wherein a gap is formed between the inner wall structure and the outer wall structure.
A sensor assembly for use in wet processing device, comprising:
- an optical liquid level detection sensor;
- and
- a sensor target cover facing the optical liquid level detection sensor;
- wherein the sensor target cover comprising:
- a reflecting plate;
- an inner wall structure surrounding the reflecting plate;
- and
- an outer wall structure surrounding the inner wall structure,
- wherein a gap is formed between the inner wall structure and the outer wall structure.
Dependencies are inferred from the claim text.