Micromechanical detection structure of a mems multi-axis gyroscope, with reduced drifts of corresponding electrical parameters

A device, comprising:

• a substrate;
• a first plurality of electrodes on the substrate;
• a first mass aligned with the first plurality of electrodes, the first mass including a hole extending through the first mass;
• and
• a coupling assembly aligned with the hole, the coupling assembly including:
• a first plurality of anchorage elements on the substrate;
• a plurality of rigid elements;
• a first plurality of elastic elements coupling the plurality of rigid elements and the first plurality of anchorage elements to each other;
• and
• a second plurality of elastic elements coupling the plurality of rigid elements to the first mass.

A device, comprising:

• a substrate;
• a first plurality of electrodes on the substrate;
• a first mass directly overlying the first plurality of electrodes, the first mass including a first opening;
• a first plurality of anchorage elements aligned with the first opening and on the substrate;
• a plurality of rigid elements aligned with the first opening, the plurality of rigid elements being elastically coupled to the first plurality of anchorage elements and the first mass.