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US 2020/0049496 A1Published application
Apparatus for measuring sample thickness and method for measuring sample thickness
AssigneeSamsung Display Co., Ltd.
InventorSeonghyeon CHEON
Life of this patent
Estimating the term…
Abstract
An apparatus for measuring thickness includes: a chamber; a sound wave transmitter transmitting a sound wave in the chamber; a sound wave receiver receiving the sound wave transmitted from the sound wave transmitter in the chamber; and a supporter between the sound wave transmitter and the sound wave receiver.
Claims20
An apparatus for measuring thickness comprising:
- a chamber;
- a sound wave transmitter transmitting a sound wave in the chamber;
- a sound wave receiver receiving the sound wave transmitted from the sound wave transmitter in the chamber;
- and
- a supporter between the sound wave transmitter and the sound wave receiver.
2 more elements
A method for measuring thickness, the method comprising:
- cooling a chamber to have a temperature equal to or lower than a predetermined temperature;
- a sound wave transmitting a sound wave using a sound wave transmitter;
- receiving the sound wave transmitted by the sound wave transmitter using a sound wave receiver;
- and
- calculating a thickness of a film based on a time difference between the transmitting the sound wave by the sound wave transmitter and the receiving the transmitted sound wave by the sound wave receiver, and the temperature of the chamber,
- the predetermined temperature is about minus 170 degrees Celsius.
3 more elements
An apparatus for measuring thickness comprising:
- a chamber;
- a sound wave transmitter transmitting a sound wave and receiving the sound wave in the chamber;
- a thermometer in the chamber;
- a cooler for cooling the chamber;
- and
- a controller connected to the sound wave transmitter, the thermometer, and the cooler, and controlling the cooler according to a temperature signal received from the thermometer,
- wherein an inner wall of the chamber comprises a sound absorbing material.
4 more elements
A method for measuring thickness, the method comprising:
- cooling a chamber to have a temperature equal to or lower than a predetermined temperature;
- transmitting a sound wave and receiving the sound wave using a sound wave transmitter;
- and
- calculating a thickness of a metal film based on a time difference between the transmitting the sound wave by the sound wave transmitter and the receiving the transmitted sound wave by the sound wave transmitter, and the temperature of the chamber,
- wherein the predetermined temperature is about minus 170 degrees Celsius.
2 more elements
Dependencies are inferred from the claim text.