Optical displacement meter

An optical displacement meter using an optical cutting method, which measures a profile of a measurement object, the meter comprising:

• a light projecting unit that irradiates the measurement object with slit light which spreads in a first direction or spot light scanned in the first direction;
• a light receiving unit that includes a plurality of pixels arranged in the first direction and a second direction intersecting with the first direction, receives reflected light from each position of the measurement object in the first direction, and outputs a light receiving amount distribution;
• a peak detection unit that detects one or a plurality of peak candidate positions of light receiving amounts in the second direction for each pixel column based on a plurality of the light receiving amount distributions respectively output from a plurality of the pixel columns arranged in the first direction;
• and
• a profile generation unit that selects a peak position to be adopted to the profile based on a relative positional relationship with a peak position of another pixel column adjacent to the pixel column from the peak candidate positions detected by the peak detection unit for each pixel column, and generates profile data indicating the profile based on the selected peak position.