Oct measurement
AssigneeHexagon Technology Center GmbH
InventorsThomas JENSEN, Zheng YANG
Life of this patent
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AssigneeHexagon Technology Center GmbH
InventorsThomas JENSEN, Zheng YANG
Estimating the term…
An optical system comprising an optical coherence tomography (OCT) measuring device and a beam deflection unit for laterally deflecting the position or angle of a beam path of the OCT measuring device. There is an optical component in the beam path, said optical component being embodied in such a way that a back-reflection of the optical component has a different configuration in terms of its longitudinal location along the beam path depending on the lateral position of the deflected beam path on the optical component. The optical system comprises an evaluation unit which is embodied in such a way that a value of the lateral position or angle deflection of the beam deflection unit is determinable on the basis of a longitudinal location of the back-reflection at the optical component determined by the OCT measuring device.
1-15. (canceled)
An optical system comprising:
A method for determining a value of a lateral position or angle deflection of a beam deflection unit in an optical system, the method comprising:
A device for determining a value of a changeable lateral position or angle deflection, the device comprising:
Dependencies are inferred from the claim text.