Vapor chamber
AssigneeMurata Manufacturing Co., Ltd.
InventorOsamu Chikagawa
Life of this patent
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Abstract
A vapor chamber that includes a housing, and working fluid that is sealed in the housing. The housing has a plurality of protrusions on at least one main surface inside the housing, the protrusions are composed of a columnar portion and a head portion, at least one lateral surface of the head portion faces a lateral surface of another head portion, and a first area of the head portion measured in a direction perpendicular to the main surface of the housing is larger than a second area of the columnar portion.
Claims20
A vapor chamber comprising:
- a housing;
- a plurality of protrusions on at least one main surface inside the housing, each of the plurality of protrusions having a columnar portion and a head portion, lateral surfaces of the head portions of adjacent protrusions of the plurality of protrusions face each other, and a first area of the head portion is larger than a second area of the columnar portion when measured in a direction perpendicular to the main surface of the housing;
- and
- a working fluid sealed in the housing.
A manufacturing method for a vapor chamber, the method comprising:
- forming a first-layer photoresist on a main surface inside of a housing;
- exposing the first-layer photoresist in a pattern corresponding to a plurality of columnar portions;
- forming a second-layer photoresist on the exposed first-layer photoresist;
- exposing the second-layer photoresist in a pattern corresponding to a plurality of head portions;
- and
- developing the first-layer photoresist and the second-layer photoresist to obtain a resist pattern with a plurality of protrusions each of which having a respective columnar portion and head portion, and such that lateral surfaces of the head portions of adjacent protrusions of the plurality of protrusions face each other, and a first area of a head portion of the plurality of head portions is larger than a second area of a columnar portion of the plurality of columnar portions when measured in a direction perpendicular to the main surface of the housing.
A manufacturing method for a vapor chamber, the method comprising:
- 3D printing a plurality of protrusions on a main surface inside of a housing such that each of the plurality of protrusions includes a respective columnar portion and head portion, and such that lateral surfaces of the head portions of adjacent protrusions of the plurality of protrusions face each other, and a first area of the head portion is larger than a second area of the columnar portion when measured in a direction perpendicular to the main surface of the housing.
Dependencies are inferred from the claim text.