Direct-Drive Flexure-Mechanism Vacuum Control Valve

A method comprising:

• connecting a stationary member of an electromagnetic actuator to a first member of a vacuum valve, where the first member comprises a fluid flow aperture therethrough;
• connecting a movable member of the electromagnetic actuator to a second member of the vacuum valve, where the second member is movably connected to the first member between an open position and a closed position relative to the fluid flow aperture;
• connecting at least one mechanical flexure between the first member and the movable member of the actuator, where the at least one mechanical flexure constrains motion of the movable member to along a substantially straight line, and where the electromagnetic actuator is configured to move the second member between the open position and the closed position.

A method comprising:

• actuating an electromagnetic actuator to move a second member of a vacuum valve relative to a first member of the vacuum valve, where the first member comprising a fluid flow aperture therethrough, and where the second member is movably connected to the first member between an open position and a closed position relative to the fluid flow aperture, where the electromagnetic actuator is configured to move the second member between the open position and the closed position, where the electromagnetic actuator comprises a stationary portion connected to the first member and a movable portion connected to the second member;
• and
• deforming a mechanical flexure as the second member is moved by the electromagnetic actuator relative to the first member, where the mechanical flexure is connected between the first member and the movable member of the actuator, and where the mechanical flexure constrains motion of the movable member to along a substantially straight line.