Diaphragm-Type Compressor, Projector, Cooler, And Method For Compressing Fluid
AssigneeSeiko Epson Corporation
InventorsTsukasa FUNASAKA, Yuki HANAMURA
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Abstract
A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.
Claims7
A diaphragm-type compressor comprising:
- a substrate;
- a diaphragm;
- and
- an actuator,
- the substrate, the diaphragm, and the actuator being laminated and provided in this order, wherein
- in a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator,
- a step is provided on a surface at the diaphragm side of the substrate, and
- a distance between the diaphragm and the substrate at a time when the actuator is not operating is larger in a region of the substrate corresponding to the first film section than a region of the substrate corresponding to the second film section.
A method for compressing fluid using a diaphragm-type compressor including a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order, a step being provided on a surface at the diaphragm side of the substrate,
- the method comprising selecting and executing, according to a requested compression ratio of the fluid, first pressing for causing the actuator to press the diaphragm for a first distance and second pressing for causing the actuator to press the diaphragm for a second distance longer than the first distance.
Dependencies are inferred from the claim text.