Tubular sapphire member, heat exchanger, semiconductor manufacturing device, and method for manufacturing tubular sapphire member
AssigneeKYOCERA Corporation
InventorsIchiro SAKANO, Keiji YUKIHIRO
Life of this patent
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Abstract
A tubular sapphire member of the present disclosure is a tubular body made of sapphire, including: an outer wall extending in an axial direction; a plurality of through holes extending in the axial direction; and one or more partition walls extending in the axial direction and dividing the plurality of through holes, wherein the axial direction is parallel to a c-axis of sapphire, at least one of the partition walls extends from a central axis toward the outer wall and is connected with the outer wall in a front view seen in the axial direction, and an extending direction of the partition wall is parallel to either an a-axis or an m-axis of sapphire.
Claims8
A tubular sapphire member comprising:
- an outer wall extending in an axial direction that is parallel to a c-axis of sapphire;
- a plurality of through-holes extending in the axial direction;
- and
- one or more partition walls extending in the axial direction and dividing the plurality of through-holes,
- at least one of the partition walls being connected with the outer wall in a front view as seen in the axial direction and extending from a central axis toward the outer wall in parallel with either an a-axis or an m-axis of sapphire.
A method for manufacturing a tubular sapphire member,
- the method comprising:
- preparing a mold having a crystal growth region in portions corresponding to an outer wall extending in an axial direction parallel to a c-axis of sapphire and one or more partition walls extending in the axial direction;
- preparing a seed crystal made of sapphire;
- aligning a crystal orientation of the seed crystal and the mold so that a pulling direction is parallel to a c-axis of the seed crystal and at least one of the partition walls extends in the direction of either an a-axis or an m-axis of the seed crystal;
- bringing the seed crystal into contact with sapphire melt present in the crystal growth region of the mold;
- and
- pulling up the seed crystal to grow a crystal.
Dependencies are inferred from the claim text.