Vertical furnace for processing substrates and a liner for use therein
AssigneeASM IP Holding B.V.
InventorFrans Wiegers
Life of this patent
Estimating the term…
Abstract
The disclosure relates to a vertical furnace for processing a plurality of substrates and a liner for use therein. The vertical furnace having an outer reaction tube having a central axis; and a liner constructed to extend in the interior of the outer reaction tube. The liner defines an interior space for accommodating substrates and is provided with a gas exhaust hole extending from the interior space to the outside. One of the outer wall of the liner and the inner wall of the reaction tube is provided with a flow deflector that protrudes radially from the respective wall into a gas passage between an outer wall of the liner and an inner wall of the reaction tube.
Claims30
A vertical furnace for processing a plurality of substrates, comprising:
- an outer reaction tube;
- and
- a liner constructed and arranged to extend in the interior of the outer reaction tube and being substantially cylindrical and delimited by a top end and a lower liner opening at a lower end and defining an interior space for accommodating a substrate boat with substrates;
- a gas passage being defined between an outer wall of the liner and an inner wall of the reaction tube;
- the liner is provided with at least one gas exhaust hole on a side and extending from the interior space to the gas passage;
- wherein at least one of the outer wall of the liner and the inner wall of the reaction tube is provided with at least one flow deflector that protrudes radially from the respective wall into the gas passage.
A liner constructed to extend in the interior of an outer reaction tube of a vertical furnace for processing a plurality of substrates, the liner being substantially cylindrical, having a central axis and delimited by a top end and a lower liner opening at a lower end and defining an interior space inside the liner for accommodating a substrate boat with substrates;
- the liner being provided with at least one gas exhaust hole on a side and extending from the interior space to the outer side of the liner;
- the liner being provided with at least one flow deflector that protrudes radially from an outer wall of the liner.
Dependencies are inferred from the claim text.