Showerhead for providing multiple materials to a process chamber

A showerhead assembly for depositing multiple materials on a substrate, comprising:

• a first gas delivery portion having a first body, a first inlet, and a plurality of first tubes extending from an inner surface of the first body and defining a first plenum, wherein each tube of the plurality of first tubes includes a plurality of first holes, and wherein the plurality of first tubes vary in length across a width of the showerhead assembly;
• a second gas delivery portion having a second body, a second inlet, and a plurality of second tubes extending from an inner surface of the second body and defining a second plenum fluidly independent from the first plenum, wherein each tube of the plurality of second tubes includes a plurality of second holes, wherein the plurality of second tubes vary in length across the width of the showerhead assembly, and wherein the plurality of first tubes are disposed in an alternating pattern with the plurality of second tubes across the width of the showerhead assembly;
• and
• a heat sink disposed between the plurality of first tubes and the plurality of second tubes.

A deposition chamber, comprising:

• a chamber body having a floor, one or more sides, and a lid to define an interior volume;
• a showerhead assembly disposed in the interior volume and having a first gas delivery portion having a first inlet fluidly coupled to a plurality of first tubes having a plurality of first holes and a second gas delivery portion having a second inlet fluidly coupled to a plurality of second tubes having a plurality of second holes;
• and
• a precursor delivery system configured to deliver a first process material to the first gas delivery portion at a first temperature and a second process material to the second gas delivery portion at the first temperature or at a second temperature different than the first temperature.