Superalloy target
AssigneesOerlikon Surface Solutions AG, PfäFfikon, Plansee Composite Materials GmbH
InventorsPeter Polcik, Jurgen Ramm
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Abstract
A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 μm, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder(s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder(s).
Claims17
Superalloy target wherein
- the superalloy target has a polycrystalline structure of random grain orientation,
- the average grain size in the structure is smaller than 20 μm, and
- the porosity in the structure is smaller than 10%.
Method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder(s) of a superalloy, and comprises the step of:
- spark plasma sintering (SPS) of the alloyed powder(s).
Dependencies are inferred from the claim text.