Pattern forming method, under coating agent, and laminate

A under coating agent used for phase separation of a self-assembly composition for pattern formation, wherein

• the under coating agent comprises a polymer containing at least one selected from a (meth)acrylate-derived unit optionally having a substituent and a styrene-derived unit optionally having a substituent,
• the self-assembly composition for pattern formation comprises a block copolymer comprising a polymerization unit (a) having at least one selected from a structure represented by the following formula (103) and a structure represented by the following formula (104), and a polymerization unit (b) having a structure represented by the following formula (105), and
• the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less, based on the total mass of the block copolymer:
• wherein, in the formulae (103) and (104), R1 each independently represents a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, an alkyl group, an acyl group, an aryl group, or a phosphoryl group, and a plurality of R1 may be identical to or different from one another;
• R5 represents a hydrogen atom or an alkyl group, and a plurality of R5 may be identical to or different from one another;
• X1 and Y1 each independently represent a single bond or a linking group, a plurality of X1 may be identical to or different from one another, and a plurality of Y1 may be identical to or different from one another;
• p represents an integer of 2 or more and 3000 or less, r represents an integer of 0 or more, and at least one of a plurality of r represents an integer of 1 or more;
• and the symbol * represents a binding site with any one of R1, or a binding site with any one oxygen atom to which R1 binds, instead of R1, when r represents 2 or more;
• and
• in the formula (105), W1 represents a carbon atom or a silicon atom, and a plurality of W1 may be identical to or different from one another;
• W2 represents —CR2—, —O—, —S—, or —SiR2— (provided that R represents a hydrogen atom or an alkyl group containing 1 to 5 carbon atoms, and a plurality of R may be identical to or different from one another), and a plurality of W2 may be identical to or different from one another;
• R11 represents a hydrogen atom, a methyl group, or a hydroxyl group, and a plurality of R11 may be identical to or different from one another;
• R12 represents a hydrogen atom, a hydroxyl group, an acetyl group, a methoxycarbonyl group, an aryl group, or a pyridyl group, and a plurality of R12 may be identical to or different from one another;
• and q represents an integer of 2 or more and 3000 or less.

A laminate having a substrate, an under layer, and a pattern-forming layer in this order, wherein

• the under layer comprises a polymer containing at least one selected from a (meth)acrylate-derived unit optionally having a substituent and a styrene-derived unit optionally having a substituent,
• the pattern-forming layer comprises a block copolymer comprising a polymerization unit (a) having at least one selected from a structure represented by the following formula (103) and a structure represented by the following formula (104), and a polymerization unit (b) having a structure represented by the following formula (105), and
• the content rate of a sugar moiety in the block copolymer is 3% by mass or more and 80% by mass or less, based on the total mass of the block copolymer:
• wherein, in the formulae (103) and (104), R1 each independently represents a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, an alkyl group, an acyl group, an aryl group, or a phosphoryl group, and a plurality of R1 may be identical to or different from one another;
• R5 represents a hydrogen atom or an alkyl group, and a plurality of R5 may be identical to or different from one another;
• X1 and Y1 each independently represent a single bond or a linking group, a plurality of X1 may be identical to or different from one another, and a plurality of Y1 may be identical to or different from one another;
• p represents an integer of 2 or more and 3000 or less, r represents an integer of 0 or more, and at least one of a plurality of r represents an integer of 1 or more;
• and the symbol * represents a binding site with any one of R1, or a binding site with any one oxygen atom to which R1 binds, instead of R1, when r represents 2 or more;
• and
• in the formula (105), W1 represents a carbon atom or a silicon atom, and a plurality of W1 may be identical to or different from one another;
• W2 represents —CR2—, —O—, —S—, or —SiR2— (provided that R represents a hydrogen atom or an alkyl group containing 1 to 5 carbon atoms, and a plurality of R may be identical to or different from one another), and a plurality of W2 may be identical to or different from one another;
• R11 represents a hydrogen atom, a methyl group, or a hydroxyl group, and a plurality of R11 may be identical to or different from one another;
• R12 represents a hydrogen atom, a hydroxyl group, an acetyl group, a methoxycarbonyl group, an aryl group, or a pyridyl group, and a plurality of R12 may be identical to or different from one another;
• and q represents an integer of 2 or more and 3000 or less.