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US 2020/0048134 A1Published application
Method and apparatus for processing oxygen-containing workpiece
AssigneeTokyo Electron Limited
InventorsReiko SASAHARA, Yasuo NAKATANI, Keiko HADA
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Abstract
There is provided a method of processing an oxygen-containing workpiece. The method of processing an oxygen-containing workpiece includes controlling a fluorine concentration in the oxygen-containing workpiece based on at least one of a kind of a fluorine-containing processing gas, a processing temperature and a processing pressure used for processing the oxygen-containing workpiece.
Claims9
A method of processing an oxygen-containing workpiece, the method comprising:
- controlling a fluorine concentration in the oxygen-containing workpiece based on at least one of a kind of a fluorine-containing processing gas, a processing temperature and a processing pressure used for processing the oxygen-containing workpiece.
An apparatus for processing an oxygen-containing workpiece, the apparatus comprising:
- a processing module configured to process the oxygen-containing workpiece by supplying a fluorine-containing processing gas or a fluorine-containing radical activated by remote plasma to the oxygen-containing workpiece;
- and
- a controller configured to control a fluorine concentration in the oxygen-containing workpiece in the processing module based on at least one of a kind of the fluorine-containing processing gas, a processing temperature and a processing pressure used for processing in the processing module.
Dependencies are inferred from the claim text.