Nano metal compound particles, coating material and film using the same, method for producing film, and method of producing nano metal compound particles
AssigneesKabushiki Kaisha Toshiba, Toshiba Materials Co., Ltd.
InventorsYuzo SHIGESATO, Junjun Jia, Daisuke Fukushi, Hideaki Hirabayashi, Yoshinori Kataoka, Akito Sasaki, Atsuya Sasaki
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Abstract
According to one embodiment, nano metal compound particles are provided. The nano metal compound particles have an average particle size of 50 nm or less. The nano metal compound particles have a peak ωt of 2.8 eV or less. The peak ωt corresponds to a resonant frequency of an oscillator according to a spectroscopic ellipsometry method fitted to a Lorentz model.
Claims16
Nano metal compound particles having an average particle size of 50 nm or less and a peak ωt of 2.8 eV or less, the peak ωt corresponding to a resonant frequency of an oscillator according to a spectroscopic ellipsometry method fitted to a Lorentz model.
Dependencies are inferred from the claim text.