Spherical boron nitride fine powder, method for manufacturing same and thermally conductive resin composition using same

Abstract

The present invention provides a spherical boron nitride fine powder and the other superior in filling property into resin. The present invention relates to a spherical boron nitride fine powder having the following characteristics (A) to (C): (A) the spherical boron nitride fine particles have any one or more of Si, Ti, Zr, Ce, Al, Mg, Ge, Ga, and V in an amount of 0.1 atm % or more and 3.0 atm % or less in its composition on the surface of 10 nm; (B) the spherical boron nitride fine powder has an average particle diameter of 0.05 μm or more and 1 μm or less; and (C) the spherical boron nitride fine powder has an average circularity of 0.8 or more.

Dependencies are inferred from the claim text.