Thin film material transfer method
AssigneeThe University of Manchester
InventorsAravind VIJAYARAGHAVAN, Christian BERGER
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Abstract
A method of transferring a two-dimensional material such as graphene onto a target substrate for use in the fabrication of micro- and nano-electromechanical systems (MEMS and NEMS). The method includes providing the two-dimensional material in a first lower state of strain; and applying the two-dimensional material onto the target substrate whilst the two-dimensional material is under a second higher state of strain. A device comprising a strained two-dimensional material suspended over a cavity.
Claims15
A method of applying a two-dimensional material onto a target substrate, the method comprising the steps of:
- a) providing the two-dimensional material in a first state of strain;
- and
- b) applying the two-dimensional material onto the target substrate whilst subjecting the two-dimensional material to a tensile stressing force which produces a second state of strain in the two-dimensional material;
- wherein the strain of the two-dimensional material in the second state of strain is higher than the strain of the two-dimensional material in the first state of strain.
A device comprising:
- a substrate having at least one cavity;
- and
- a two-dimensional material mounted on the substrate;
- wherein the two-dimensional material spans at least a part of the cavity;
- and
- wherein the two-dimensional material has a strain of from 0.05 to 1.5%.
Dependencies are inferred from the claim text.