A printing method of manufacturing nanobeam structures

A printing method of manufacturing nanobeam structures, comprising the following steps:

• preparing a substrate, wherein the nanobeam structure mainly includes a nano-freebeam and a nano-cantilever beam, so the substrates are prepared according to the form of nanobeams;
• the substrate used to print the nano-cantilever beam is of a high temperature resistance flat-plate structure, and the substrate used to print the nano-freebeam is of a high temperature resistance flat-plate structure with a prefabricated trench of a certain high aspect;
• the trench is prepared by means of micro/nano processing techniques of photolithograph, etching, ion beam and so on;
• subsequently, an electrode is prepared on the substrate by using magnetron sputtering, vapor deposition and electroforming;
• forming a coaxial jet, wherein, according to the requirements for the nanobeam structure material, an inner function material and an outer high viscous material are injected in a coaxial needle by two micro syringe pumps, respectively;
• the coaxial needle is connected to a high voltage power supply;
• a stable coaxial jet on the tip of the coaxial needle can be obtained under the working parameters of the flow rate of an inner liquid at a range of 1 pL/min-5 pL/min, the flow rate of an outer liquid at the range of 100 nL/min-150 nL/min, an applied voltage at the range of 500 V to 1000 V, and a coaxial needle-substrate distance at the range of 500 pan-1 mm;
• and
• printing of nanobeam structure, wherein the substrate is fixed on a motion stage by a vacuum adsorption device, which is moved at the speed of 80 mm/s-100 mm/s;
• the substrate is perpendicular to the coaxial needle, a linear bilayer encapsulated structure consisting of an inner function material and an outer high viscous material can be obtained when the coaxial jet is printed on the substrate;
• after printing, under the effect of a thermal field, the inner function liquid and outer high viscous liquid are solidified and semi-solidified respectively, and the semi-solidified outer high viscous liquid plays a role of supporting an inner nanobeam structure;
• finally, a nanobeam structure only consisting of inner function material is formed on the substrate when the outer high viscous material is removed by the methods of pyrolysis or solution dissolution.