Back to results
US 2020/0048077 A1Published application
Apparatus and method of increased aspect ratios in comb structures
AssigneeHoneywell International Inc.
InventorsMu hong Lin, Eugene Freeman
Life of this patent
Estimating the term…
Abstract
A method comprises: patterning a substrate, including a conductive region, with photoresist exposed by lithography, where the substrate is mounted on a handle substrate; forming a comb structure with conductive fingers on the substrate by at least removing a portion of the conductive region of the substrate; removing the photoresist; forming, one atomic layer at a time, at least one atomic layer of at least one conductor over at least one sidewall of each conductive finger; attaching at least one insulator layer to the comb structure, and the substrate from which the comb structure is formed; and removing the handle substrate.
Claims20
A method, comprising:
- patterning a substrate, including a conductive region, with photoresist exposed by lithography, where the substrate is mounted on a handle substrate;
- forming a comb structure with conductive fingers on the substrate by at least removing a portion of the conductive region of the substrate;
- removing the photoresist;
- conformally forming, one atomic layer at a time, at least one atomic layer of at least one conductor over at least one sidewall of each conductive finger;
- wherein the at least one atomic layer has a uniform thickness over the at least one sidewall;
- attaching at least one insulator layer to the comb structure, and the substrate from which the comb structure is formed;
- and
- removing the handle substrate.
5 more elements
A comb structure, comprising:
- a set of flexible conductive fingers comprising at least one conductor;
- a set of rigid conductive fingers comprising the at least one conductor;
- wherein the flexible conductive fingers and the rigid conductive fingers are interdigitated;
- wherein each of the flexible conductive fingers has at least one sidewall each of which is opposite of a sidewall of a rigid conductive finger;
- wherein at least one of:
- (a) the at least one sidewall of the flexible conductive fingers and (b) each of the corresponding opposite sidewalls of the rigid conductive fingers is conformally covered by at least one atomic layer, of at least one conductor, formed one atomic layer at a time;
- wherein the at least one atomic layer has a uniform thickness over the sidewalls that it covers;
- and
- at least one insulator layer attaching each set to a substrate.
6 more elements
A micro-electro-mechanical systems (MEMS) gyroscope, comprising:
- a first proof mass;
- a second proof mass;
- a first cross-beam;
- a second cross-beam;
- a first set of suspension springs mechanically coupled between the proof mass and the first cross-beam and the second cross-beam;
- a second set of suspension springs mechanically coupled between the proof mass and the first cross-beam and the second cross-beam;
- a substrate;
- a third set of suspension springs mechanically coupled between the first cross-beam and the substrate;
- a fourth set of suspension springs mechanically coupled between the second cross-beam and the substrate;
- at least one first support member coupling the first cross-beam and the substrate;
- at least one second support member coupling the first cross-beam and the substrate;
- a first set of sense combs attached to the first proof mass and comprising flexible conductive fingers mechanically coupled to the first proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- a second set of sense combs attached to the second proof mass and comprising flexible conductive fingers mechanically coupled to the second proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- a first set of drive comb electrodes attached to the first proof mass and comprising flexible conductive fingers mechanically coupled to the first proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- a second set of drive comb electrodes attached to the second proof mass and comprising flexible conductive fingers mechanically coupled to the second proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- a first set of motor pick off combs attached to the first proof mass and comprising flexible conductive fingers mechanically coupled to the first proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- a second set of motor pickoff combs attached to the second proof mass and comprising flexible conductive fingers mechanically coupled to the second proof mass, and interdigitated with rigid conductive fingers fixedly coupled to a substrate;
- wherein, in each set, each of the flexible conductive fingers has at least one sidewall each of which is opposite of a sidewall of a rigid conductive finger;
- wherein at least one of:
- (a) the at least one sidewall of the flexible conductive fingers and (b) each of the corresponding opposite sidewalls of the rigid conductive fingers is conformally covered by at least one atomic layer, of at least one conductor, formed one atomic layer at a time;
- wherein the at least one atomic layer has a uniform thickness over the sidewalls that it covers;
- and
- at least one insulator layer attaching each set to a substrate.
20 more elements
Dependencies are inferred from the claim text.