Liquid ejection device, cleaning apparatus and cleaning method for module substrate
AssigneeCanon Kabushiki Kaisha
InventorsAkiko Iimura, Hisashi Namba, Noriyasu Hasegawa, Masahiro Kuri
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Abstract
A liquid ejection device, a cleaning apparatus and a cleaning method for a module substrate, which can remove foreign matters on an ejection opening face and in a flow path connected with an ejection opening is provided. For that purpose, an ejection opening face is covered with liquid, cleaning is performed by driving a device configured to vibrate liquid, and after that the liquid is collected.
Claims20
A liquid ejection device, comprising:
- a storage container storing liquid;
- a device configured to eject liquid, the device being for ejecting the liquid stored in the storage container from an ejection opening provided for an ejection opening face;
- a device configured to hold liquid, the device being capable of holding liquid between itself and the ejection opening face;
- and
- a device configured to collect liquid, the device being for collecting the liquid held with the device configured to hold liquid,
- wherein the liquid ejection device further includes a device configured to vibrate liquid, the device being for vibrating the liquid held with the device configured to hold liquid.
A cleaning apparatus for cleaning a module substrate, the substrate being for ejecting liquid from an ejection opening, the apparatus comprising:
- a device configured to hold liquid capable of holding liquid between itself and an ejection opening face, for which the ejection opening is formed, of the module substrate;
- a device configured to supply liquid between the ejection opening face and the device configured to hold liquid;
- a device configured to vibrate liquid, the device being for vibrating liquid held with the device configured to hold liquid;
- and
- a device configured to collect liquid, the device being for collecting the liquid held with the device configured to hold liquid.
A cleaning method for a module substrate for ejecting liquid from an ejection opening, comprising:
- an arrangement process arranging an ejection opening face of the module substrate, to which the ejection opening has been formed, and a holding portion of a holding member capable of holding liquid between itself and the ejection opening face, so as to face each other at a predetermined space;
- a holding process supplying and holding liquid between the ejection opening face and the holding portion;
- a vibrating process vibrating the liquid held in the holding process;
- and
- a collecting process collecting the liquid supplied between the ejection opening face and the holding portion.
Dependencies are inferred from the claim text.