Apparatus and method for detecting failure in a mechanical press
AssigneeAsm Technology Singapore Pte Ltd
InventorsKwok Pun LAW, Hong Yeung LI, Cho Wai LEUNG
Life of this patent
Estimating the term…
Loading patent…
AssigneeAsm Technology Singapore Pte Ltd
InventorsKwok Pun LAW, Hong Yeung LI, Cho Wai LEUNG
Estimating the term…
An apparatus and a method for detecting a failure in a press for punching semiconductor devices are provided, where the method comprises the steps of locating a semiconductor device between a first die-set part and a second die-set part comprised in the press, and moving the first die-set part and the second die-set part relative to each other for punching the semiconductor device therebetween. The method further comprises the steps of monitoring a parameter with a sensor attached to the first die-set part and/or the second die-set part at different positions of the first die-set part when it is moving relative to the second die set part while punching the semiconductor device, and comparing a present variation of the parameter at different positions of the first die-set part relative to the second die-set part against an expected variation of the parameter at positions of the first die-set part relative to the second die-set part during normal operation of the press when there is no failure while punching the semiconductor device. The method also comprises the step of determining that a failure has occurred in the press when the present variation of the parameter is different from the expected variation of the parameter.
A method of detecting a failure in a press for punching semiconductor devices, comprising the steps of:
An apparatus for detecting a failure in a press for punching semiconductor devices, comprising:
Dependencies are inferred from the claim text.