Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

A substrate holding mechanism comprising:

• a base;
• substrate-support members supported by said base and configured to be movable in a vertical direction relative to said base;
• substrate-clamp portions provided on upper ends of said substrate-support members, respectively;
• a drive mechanism configured to move said substrate-support members in the vertical direction;
• and
• a pressing mechanism configured to cause at least one of said substrate-clamp portions on at least one of said substrate-support members to press a substrate in conjunction with a downward movement of said substrate-support members and configured to cause said at least one of said substrate-clamp portions to move away from the substrate in conjunction with an upward movement of said substrate-support members.