Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device
AssigneeEbara Corporation
InventorsShingo Togashi, Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya
Life of this patent
Estimating the term…
Abstract
Provided is a substrate holding device used in a substrate polishing apparatus that polishes a substrate using a polishing pad. The substrate holding device includes: a retainer ring configured to hold a peripheral edge of the substrate; and a drive ring fixed to the retainer ring so as to rotate together with the retainer ring. The surface of the retainer ring at the polishing pad side has a convex portion at a position other than an innermost circumference following a shape of the drive ring.
Claims11
(canceled)
A substrate holding device used in a substrate polishing apparatus that polishes a substrate using a polishing pad, the substrate holding device comprising:
- a retainer ring including an inner retainer ring configured to hold a peripheral edge of the substrate and an outer retainer ring provided outside the inner retainer ring;
- and
- a drive ring fixed to the retainer ring to rotate together with the retainer ring,
- wherein a surface of the inner retainer ring and/or a surface of the outer retainer ring at a polishing pad side have a convex portion following a shape of the drive ring.
(canceled)
A substrate holding device used in a substrate polishing apparatus that polishes a substrate using a polishing pad, the substrate holding device comprising:
- a retainer ring configured to hold a peripheral edge of the substrate;
- a drive ring fixed to the retainer ring to rotate together with the retainer ring;
- and
- a ring-type annular member configured, substantially over an entire circumference thereof, to be in contact with the drive ring at one portion thereof and to be in contact with the retainer ring at another portion thereof,
- wherein a surface of the retainer ring at a polishing pad side has a convex portion following a shape of the annular member.
8-15. (canceled)
A method of manufacturing a substrate holding device used in a substrate polishing apparatus that polishes a substrate using a polishing pad, the method comprising:
- providing a retainer ring, as a consumable part, to hold a peripheral edge of the substrate;
- fixing a drive ring to the retainer ring to rotate together with the retainer ring;
- providing a ring-type annular member in such a manner in which, substantially over an entire circumference of the annular member, a portion is in contact with the drive ring, and another portion is in contact with the retainer ring;
- and
- determining a shape of the annular member according to a shape of a surface of a used retainer ring at a polishing pad side.
Dependencies are inferred from the claim text.