Chemical solution discharge device

A chemical solution discharge device, comprising:

• a substrate comprising a plurality of first pressure chambers and a plurality of second pressure chambers respectively adjacent to the plurality of first pressure chambers, which communicate with nozzles for discharging the chemical solution and are filled with a chemical solution, and chemical solution supply ports for supplying the chemical solution to the plurality of first pressure chambers and second pressure chambers, wherein each of the plurality of first pressure chambers and second pressure chambers has a size L in a depth direction larger than a size D in a width direction;
• holding containers configured to communicate with the plurality of first pressure chambers and second pressure chambers via the chemical solution supply ports, and to hold the chemical solution;
• a plurality of first actuators configured to change a pressure of the chemical solution in the plurality of first pressure chambers, and to discharge the chemical solution from the nozzles;
• a plurality of second actuators configured to change a pressure of the chemical solution in the plurality of second pressure chambers, and to discharge the chemical solution from the nozzles;
• a first conductive wire configured to supply a first driving signal to the plurality of first actuators;
• and
• a second conductive wire configured to supply a second driving signal to the plurality of second actuators.

A chemical solution processing system, comprising:

• a substrate comprising a plurality of first pressure chambers and a plurality of second pressure chambers respectively adjacent to the plurality of first pressure chambers, which communicate with nozzles for discharging a chemical solution and are filled with the chemical solution, and chemical solution supply ports for supplying the chemical solution to the plurality of first pressure chambers and second pressure chambers;
• holding containers configured to communicate with the plurality of first pressure chambers and second pressure chambers via the chemical solution supply ports, and to hold the chemical solution;
• a plurality of first actuators configured to change a pressure of the chemical solution in the plurality of first pressure chambers, and to discharge the chemical solution from the nozzles;
• a plurality of second actuators configured to change a pressure of the chemical solution in the plurality of second pressure chambers, and to discharge the chemical solution from the nozzles;
• a first conductive wire configured to supply a first driving signal to the plurality of first actuators;
• a second conductive wire configured to supply a second driving signal to the plurality of second actuators;
• and
• a microplate comprising a plurality of well openings for receiving discharged chemical solution from the nozzles.