Substrate processing machine
AssigneeFuji Corporation
InventorsMitsuru SANJI, Shingo FUJIMURA
Life of this patent
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Abstract
The object is to provide a substrate processing machine facilitating checking the operation of a device in the interior of a housing from the exterior of the housing. The substrate processing machine includes a base and a module, disposed on the base, and has a device configured to perform a predetermined operation contributing to the production of a substrate. The module can be switched between a fabrication position where the substrate is produced and an offset position that deviates from the production position relative to the base. The device can operate in the production position and the offset position. The operation speed of the device in the offset position is slower than the operation speed of the device to in the production position.
Claims6
-5. (canceled)
A substrate processing machine, comprising:
- a base and
- a module, disposed on the base, having a device configured to perform a predetermined operation contributing to the production of a substrate;
- wherein the module is configured to be switched between a production position where the substrate is produced and an offset position that deviates from the production position relative to the base;
- wherein the device is configured to operate in the fabrication position and the offset position;
- and
- wherein the operation speed of the device in the offset position is slower than the operation speed of the device in the production position.
Dependencies are inferred from the claim text.